產(chǎn)品名稱 |
規(guī)格(長×寬)mm |
精度等級 |
|||
0 |
1 |
2 |
3 |
||
平面度公差(um) |
|||||
研磨平板
|
100×100 |
4.6 |
9.1 |
18.3 |
|
100×200 |
4.9 |
9.8 |
19.6 |
|
|
200×200 |
5 |
10.3 |
20.5 |
|
|
200×300 |
5.5 |
10.9 |
21.8 |
|
|
300×300 |
5.5 |
11.4 |
22.8 |
|
|
300×400 |
6 |
12 |
24 |
|
|
400×400 |
6.5 |
12.5 |
25.1 |
|
|
400×500 |
6.5 |
13.1 |
26.2 |
65.6 |
|
400×600 |
6.8 |
13.7
|